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ENS 48014
Special Topics in ENS: Opto-Nano-And Micro-Electro-Mechanical and Electro-Chemical Systems

Faculty Faculty of Engineering and Natural Sciences
Semester Fall 2026-2027
Course ENS 48014 - Special Topics in ENS: Opto-Nano-And Micro-Electro-Mechanical and Electro-Chemical Systems
Time/Place
Time
Week Day
Place
Date
09:40-12:30
Thu
FENS-L061
Sep 28-Dec 31, 2026
Level of course
Course Credits SU Credit:3, ECTS:6, Engineering:6
Prerequisites -
Corequisites -
Course Type Lecture

Instructor(s) Information

Mustafa Yavuz

Instructor: Dr. Mustafa Yavuz  (Visiting Faculty)

Office: FENS1048 (Prof. Mehmet Yildiz’s Office)

Email: mustafa.yavuz@sabanciuniv.edu 

Web: https://uwaterloo.ca/mechanical-mechatronics-engineering/profile/myavuz 

 

Course Information

Catalog Course Description
This course is based on fundamentals of free electron theory and electron interaction with surrounding and how to use these interactions to device/test/characterize nano, micro electro-mechanical and photonic systems via analytical and simulation methods. It also includes some hands on of basic nano and micromachining manufacturing and testing using nano tools.
Learning Outcomes:
1. Explain the basic principles of free electron theory and electron?environment interactions.
2. Use electron-surrounding interactions to design nano and micro devices
3. Use software tools to design opto-nano and micro electro-mechanical systems
4. Decide which testing methods required to characterize these devices and their performance
5. Follow of recent technology advancement on hybrid sensors and sensor networks and smart interfaces
Course Objective
This course is designed to provide an introductory insight and basic fundamental knowledge to understand current advances in new generation hybrid opto-nano- and opto-micro-electro-mechanical sensors with emphasis on electro-mechanical and electro-chemical sensing. It is also aimed to gain students hands on experience by accessing cleanroom (SUNUM) (depending on funding availability) and device design software such as COMSOL (depending on TA availability).
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Course Materials

Resources:
As references:
-Principles Electronic Materials and Devices, S.O. Kasap, 3rd Edition, 2006
-Journal Papers
-Lecture Notes
Technology Requirements:

Policies