Syllabus Application
Semiconductor Process Technology
EE 533
Faculty:
Faculty of Engineering and Natural Sciences
Semester:
Fall 2025-2026
Course:
Semiconductor Process Technology - EE 533
Classroom:
FENS-L062
Level of course:
Masters
Course Credits:
SU Credit:3.000, ECTS:10
Prerequisites:
-
Corequisites:
EE 533L
Course Type:
Lecture
Instructor(s) Information
Murat Kaya Yapıcı
- Email: mkyapici@sabanciuniv.edu
Course Information
Catalog Course Description
Theoretical analysis of the chemistry and physics of process technologies used in micro-electronics fabrication. Topics include semiconductor growth, material characterization, lithography tools, photo-resist models, thin film deposition, chemical etching, plasma etching, electrical contact formation, microstructure processing and process modeling.
Course Learning Outcomes:
| 1. | Develop a working knowledge of the unit processes involved in IC fabrication |
|---|---|
| 2. | Learning the real structures of various semiconductor devices and the process flows for their physical realization |
| 3. | understanding the reasons for layout rules in VLSI design |
| 4. | Gaining hands-on experience in clean room |
| 5. | Obtaining an overall understanding of the roadmap of the semiconductor industry |
Course Objective
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Course Materials
Resources:
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Technology Requirements:
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