Semiconductor Process Technology
EE 533

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Faculty: Faculty of Engineering and Natural Sciences
Semester: Fall 2025-2026
Course: Semiconductor Process Technology - EE 533
Classroom: FENS-L062
Level of course: Masters
Course Credits: SU Credit:3.000, ECTS:10
Prerequisites: -
Corequisites: EE 533L
Course Type: Lecture

Instructor(s) Information

Murat Kaya Yapıcı

Course Information

Catalog Course Description
Theoretical analysis of the chemistry and physics of process technologies used in micro-electronics fabrication. Topics include semiconductor growth, material characterization, lithography tools, photo-resist models, thin film deposition, chemical etching, plasma etching, electrical contact formation, microstructure processing and process modeling.
Course Learning Outcomes:
1. Develop a working knowledge of the unit processes involved in IC fabrication
2. Learning the real structures of various semiconductor devices and the process flows for their physical realization
3. understanding the reasons for layout rules in VLSI design
4. Gaining hands-on experience in clean room
5. Obtaining an overall understanding of the roadmap of the semiconductor industry
Course Objective
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Course Materials

Resources:
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Technology Requirements:
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