Introduction to Electron Microscopy
MAT 571

Unpublished Syllabus
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Faculty: Faculty of Engineering and Natural Sciences
Semester: Fall 2025-2026
Course: Introduction to Electron Microscopy - MAT 571
Classroom: FENS-L055,FENS-L058
Level of course: Masters
Course Credits: SU Credit:3.000, ECTS:10
Prerequisites: -
Corequisites: MAT 571L
Course Type: Lecture

Instructor(s) Information

Mehmet Ali Gülgün

Course Information

Catalog Course Description
The course will treat electron optics and diffraction physic as a basis for the advanced course. It will go into the construction and functions of different types of electron microscopes and detectors. The largest portion of the course is devoted to analyzing materials and their defects with the help of electron optics and diffraction physics. A short but essential introduction to analytical electron microscopy and spectroscopic techniques will be given. The course will have 3-4 laboratory exercises to introduce practical issues with the electron microscopy.
Course Learning Outcomes:
1. AIMS ? To teach the student fundamentals of using electrons in imaging of materials and demonstrate the main differences between Electron Microscopy and Optical Microscopy ? To define the limits of scanning electron microscopy (SEM) and introduce the concepts in transmission electron microscopy (TEM). ? To explain the capabilities and science behind the TEM technique. INTENDED LEARNING OUTCOMES 1. Module Specific Skills. By the end of this module, the students should be able to: (a) Know the working principle of SEM and how images are obtained (b) Explain the types of interactions between energetic electrons and matter (c) Define how these interactions are used to carry out spectral analysis (d) Compare SEM and TEM methods and know each technique?s limitations 2. Discipline Specific Skills. By the end of this module, the students should: (e) understand how an electron beam is generated and utilized in imaging (f) know what type of information one can extract from the interactions between electrons and the sample in the SEM and TEM (g) comprehend how various detectors work (h) understand the principle of diffraction and its use in structural characterization. (i) know the differences between various techniques to obtain different contrasts in the TEM. 3. Individual and Key Skills. By the end of this module, the students will: (j) gain an understanding of fundamentals of imaging using electrons (k) be able to reach a level where they can decide which technique they would use in their research. (l) relate various types of contrasts in both SEM and TEM to the processes that might have taken place in materials. (m) be at a level where they will know how to present their results they obtained using electron microscopy in their research. (s) think and make decisions on the path which will enable them to resolve a given issue.
Course Objective
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Course Materials

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