Syllabus Application
EE 626
Microelectromechanical Systems (MEMS)
Faculty
Faculty of Engineering and Natural Sciences
Semester
Spring 2025-2026
Course
EE 626 -
Microelectromechanical Systems (MEMS)
Time/Place
Time
Week Day
Place
Date
11:40-13:30
Tue
FENS-L035
Feb 16-May 22, 2026
10:40-11:30
Wed
FENS-L062
Feb 16-May 22, 2026
Level of course
Masters
Course Credits
SU Credit:3, ECTS:10
Prerequisites
-
Corequisites
EE 626L
Course Type
Lecture
Instructor(s) Information
Murat Kaya Yapıcı
- Email: mkyapici@sabanciuniv.edu
Course Information
Catalog Course Description
The course includes a summary of integrated circuit fabrication technologies leading into an overview of the technologies available to shape electromechanical elements on a submillimeter scale. Physics of MEMS devices will be covered at a level necessary to design and analyze new devices and systems. Electronic interfacing, mechanical and electrical noise, fundamental limits of CAD tools, layout, process simulation.
Course Learning Outcomes:
| 1. | To be able to explain what MEMS and microsystems are. |
|---|---|
| 2. | To explain the working principles of many MEMS and microsystems in the marketplace. |
| 3. | To understand the relevant engineering science topics relating to MEMS and microsystems. |
| 4. | To be able to distinguish the design, manufacture and packaging techniques applicable to microsystems from those for integrated circuits. |
| 5. | To become familiar with the materials, in particular, silicon and its compounds for MEMS. |
| 6. | To be able to explain the basic and relevant design principles of MEMS and microsystems. |
| 7. | To learn the scaling laws for miniaturization. |
| 8. | To be able to identify the optimal microfabrication and packaging techniques for micro devices and systems. |
| 9. | To be able to handle mechanical systems engineering design of micro scale devices. |
| 10. | To learn the fundamentals of nanotechnology. |
Course Objective
This course will cover the theory and principles of major sensing/actuation mechanisms (including electrostatic, piezoelectric, thermal, piezorezistive, electromagnetic) and electromechanical concepts which are relevant for the design of MEMS devices, micro sensors and actuators. The course will teach the basic design principles for MEMS and micro/nanoscale devices, will discuss the important application areas of MEMS (RF, Bio, Optics) and nanotechnology; as well as, the fundamental principles of microfabrication and micromachining techniques for micro/nano devices and systems.
Sustainable Development Goals (SDGs) Related to This Course:
| Industry, Innovation and Infrastructure |
Course Materials
Resources:
Textbook:
Foundations of MEMS, 2nd edition, by Chang Liu, Pearson, Essex, England, 2012. (ISBN-10: 0273752243, ISBN-13: 9780273752240)
Supplementary Readings:
1. MEMS & Microsystems Design, Manufacture, and Nanoscale Engineering,
2nd edition, by Tai-Ran Hsu, John Wiley & Sons, Inc., Hoboken, NJ. 2008
(ISBN 978-0-470-08301-7)
2. Fundamentals of Microfabrications: The Science of Miniaturization, Marc J.Madou, Taylor & Francis, Inc., 2002 (ISBN 9780849308260
3. Micromachined Transducers Sourcebook, G. Kovacs, McGraw-Hill, 1998.
4. Microchip Fabrication, 3rd ed., Peter van Zant, McGraw-Hill, 1997.
Foundations of MEMS, 2nd edition, by Chang Liu, Pearson, Essex, England, 2012. (ISBN-10: 0273752243, ISBN-13: 9780273752240)
Supplementary Readings:
1. MEMS & Microsystems Design, Manufacture, and Nanoscale Engineering,
2nd edition, by Tai-Ran Hsu, John Wiley & Sons, Inc., Hoboken, NJ. 2008
(ISBN 978-0-470-08301-7)
2. Fundamentals of Microfabrications: The Science of Miniaturization, Marc J.Madou, Taylor & Francis, Inc., 2002 (ISBN 9780849308260
3. Micromachined Transducers Sourcebook, G. Kovacs, McGraw-Hill, 1998.
4. Microchip Fabrication, 3rd ed., Peter van Zant, McGraw-Hill, 1997.
Technology Requirements:
Laptop computer (Windows operating system).